E11200 - SEMI E112 - Specification for a 150 mm Multiple Reticle SMIF Pod (MRSP150) Used to Transport and Store Multiple 6 Inch Reticles StdPbc-0998 本文書は2006年，全面的に改訂された。

本文書は2006年，全面的に改訂された。

• Reduction of operator efforts to download recipes that are used for production from Recipe Server to equipment by providing an automatic transfer mechanism based on cache

This Test Method applies to all type of high purity gas delivery systems used in semiconductor manufacturing facilities and comparable research and development areas

This Standard does not address any safety or performance issues related to RF emissions or electrical codes (e

This Guide is intended to prevent confusion and misunderstanding between manufacturers and users

E11200 - SEMI E112 - Specification for a 150 mm Multiple Reticle SMIF Pod (MRSP150) Used to Transport and Store Multiple 6 Inch Reticles StdPbc-0998 本文書は2006年，全面的に改訂された。NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interchangeability at all mechanical interfaces. Most of the requirements given