C07200 - SEMI C72 - Guide for Propylene-Glycol-Mono-Methyl-Ether (PGME), Propylene-Glycol-Mono-Methyl-Ether-Acetate (PGMEA) and the Mixture 70wt% PGME/30wt% PGMEA StdTpc-FPD Masks Dimethyldimethoxysilane

Dimethyldimethoxysilane

are clarified and that standardization as to masks will be promoted

" Where an analytical procedure different from that provided is substituted by a supplier or user

SEMI C93-0217 (preliminary status removed)

スタンダードは，Gases Global Technical Committeeで技術的に承認されている。現版は2011年9月12日，global Audits and Reviews Subcommitteeにて発行が承認された。2011年11月にwww

C07200 - SEMI C72 - Guide for Propylene-Glycol-Mono-Methyl-Ether (PGME), Propylene-Glycol-Mono-Methyl-Ether-Acetate (PGMEA) and the Mixture 70wt% PGME/30wt% PGMEA StdTpc-FPD Masks DimethyldimethoxysilaneThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at www. semiviews. org and www. semi. org in March 2017; originally published August 2011. The purpose of this Document is to provide a guide for propylene glycol mono methyl ether (PGME), propylene glycol mono methyl ether acetate (PGMEA) and