S01000 - SEMI S10 - Safety Guideline for Risk Assessment and Risk Evaluation Process StdPbc-1017 This Specification divides reclaimed wafers

This Specification divides reclaimed wafers into four application categories: Mechanical

and assembly processes to the point of use in the final system

analysis and reporting of oxide integrity data via the voltage ramp technique among interested parties

注意：SEMI E118は2004年11月にサブドキュメントSEMI E118

SEMI M57-0706 (technical revision)

S01000 - SEMI S10 - Safety Guideline for Risk Assessment and Risk Evaluation Process StdPbc-1017 This Specification divides reclaimed wafersE This Safety Guideline was editorially modified in December 2023 to add Note 9 and to correct a processing error. Changes were made to 6. 1. 3, 6. 10. 2. 2. 4, 6. 10. 2. 2. 4. 1, and 6. 10. 2. 2. 4. 2. The primary purpose of this Safety Guideline is to define a consistent means of risk estimation which can be invoked by other SEMI Safety Guidelines. A secondary purpose of this Safety Guideline is to describe, generally, several other aspects of risk