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BWS measurement performance may surpass what is contained in this Guide
procedures for preparing and calibrating resistivity reference wafers
Two procedures for computing the results are provided
SEMI D6-0308 (technical revision)
1 These test methods are both in use within the industry
PV00900 - SEMI PV9 - 短時間光パルス照射後のマイクロ波反射率の非接触測定による，PVシリコン材料の過剰キャリア減衰（ライフタイム）試験方法 StdPbc-1121 BWS measurement performance may surpassglobal Photovoltaic Committee2011513global Audits and Reviews Subcommittee20116www. semiviews. org www. semi. org201010 () ((m PCD) Referenced SEMI Standards SEMI M59 Terminology for Silicon Technology SEMI MF42 Test Methods for Conductivity Type of Extrinsic Semiconducting Materials SEMI MF43 Test Methods for Resistivity of Semiconductor Materials SEMI MF84 Test Method for Measuring Resistivity of Silicon Wafers With an In Line Four Point Probe SEMI
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