M07100 - SEMI M71 - Specification for Silicon-on-Insulator (SOI) Wafers for CMOS LSI StdPbc-1113 It may be applied to

It may be applied to subsystems of other multi-resource equipment

本スタンダードは， Physical Interfaces & Carriers Global Technical Committeeで技術的に承認されている。現版は2014年5月12日，global Audits and Reviews Subcommitteeにて発行が承認された。2014年7月にwww

This Test Method defines an evaluation method for EFFU which is installed inside an enclosed space to remove particles that are generated inside process equipment

Application of this test method is expected to yield comparable data among POU purifiers and filters tested for the purposes of qualification for its installation

• Mechanical connectors

M07100 - SEMI M71 - Specification for Silicon-on-Insulator (SOI) Wafers for CMOS LSI StdPbc-1113 It may be applied to1 Purpose 1. 1 This Specification defines thin layer silicon on insulator (SOI) wafer requirements for CMOS large scale integrated circuit (LSI) devices. In the case of 200 and 300 mm wafers this Specification is targeted for nodes from 130 to 14 nm. In the case of 150 mm wafers, older LSI generations are included as well. By defining parameters, inspection procedures and acceptance criteria, both suppliers and customers may uniformly define product