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HSMS는 고속 통신이 요구되는 곳이나 단순한 포인트 투 포인트 토폴로지(Point-to-Point Topology)가 충분치 않을 때 어플리케이션에 대한 SEMI E4 (SECS-I)의 대안이며
SEMI MS4-0416 (Reapproved 0522)
SEMI E83-0699 (first published)
The scope of this Document covers high purity TDMAS which is used in the semiconductor industry for the deposition of silicon oxide and silicon nitride based layers by atomic layer deposition
1 Inspection of silicon wafer surfaces is a standard outgoing test on all commercially sold silicon wafers
P01100 - SEMI P11 - Test Method for Determination of Total Normality for Alkaline Developer Solutions Revision:SEMI P11-0308 - Inactive HSMS는 고속 통신이 요구되는 곳이나This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 20, 2007. Available at www. semi. org in February 2008; originally published in 1991; previously published September 1997. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met.
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