E01000 - SEMI E10 - Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization Revision:SEMI E10-0221 - Superseded This Document applies to hydrogen

This Document applies to hydrogen (H2) delivered through specialty gas systems at pressures up to 8 × 105 Pa (8 atmospheres)

orgで入手可能になり，2003年7月発行に至る。初版は1995年発行。

SEMI M17-1110 (Reapproved 1121)

where a 450 FOUP and 450 MAC can be loaded and unloaded

This edition was approved for publication by the global Audits and Reviews Subcommittee on May 19

E01000 - SEMI E10 - Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization Revision:SEMI E10-0221 - Superseded This Document applies to hydrogen1 Purpose 1. 1 This Specification establishes a common basis for communication between users and suppliers of manufacturing equipment in the semiconductor and related industries by providing a standardized methodology for measuring reliability, availability, and maintainability (RAM) and utilization performance of equipment in a manufacturing environment. 2 Scope 2. 1 This Specification defines six mutually exclusive, basic equipment states for all of