F11900 - SEMI F119 - Test Method for Determining the Critical Pitting Temperature of Stainless Steel Surfaces Used in Corrosive Gas Systems by Use of a Ferric Chloride Solution Revision:SEMI F119-1121 - Current Examples of LLSs are particles

Examples of LLSs are particles and pits

SEMI T7-0303 (Reapproved 0709)

SEMI E128-0310 (technical revision)

and manipulation of the O2 data in identifying atmospheric leak sources

ジボラン混合ガスの仕様と分析方法を定義し，その仕様の有効性を確認する。

F11900 - SEMI F119 - Test Method for Determining the Critical Pitting Temperature of Stainless Steel Surfaces Used in Corrosive Gas Systems by Use of a Ferric Chloride Solution Revision:SEMI F119-1121 - Current Examples of LLSs are particlesThe purpose of this Test Method is to determine the relative resistance to pitting corrosion of the wetted surfaces of components intended for use in corrosive gas distribution systems for semiconductor manufacturing. This Test Method is an adaptation of ASTM G48 and is intended to differentiate between stainless steels of differing compositions or processing that may affect the corrosion performance of the wetted surfaces. Detailed information on the