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F09400 - SEMI F94 - Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.5 Inch Four Fastener Configuration Type Surface Mount Gas Distribution Systems Revision:SEMI F94-1012 - Inactive SEMI MF673 — Test Methods

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Description

SEMI MF673 — Test Methods for Measuring Resistivity of Semiconductor Slices or Sheet Resistance of Semiconductor Films with a Noncontact Eddy-Current Gage

The principles of this Practice may be adapted to determine the uniformity of bulk silicon wafer properties such as interstitial oxygen content and resistivity

This Specification shall be used by vendors and/or buyers of glass substrates for flat panel display and is effective for all glass substrates used

Because these test methods are destructive

previously published June 2009

F09400 - SEMI F94 - Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.5 Inch Four Fastener Configuration Type Surface Mount Gas Distribution Systems Revision:SEMI F94-1012 - Inactive SEMI MF673 — Test MethodsThis Standard was technically approved by the global Gases Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 30, 2012. Available at www. semiviews. org and www. semi. org in October 2012; originally published March 2004; previously published March 2012. This Standard establishes the properties and physical of two port components for 1. 5 inch type surface mount gas distribution

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