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6-0421 (technical revision)
and control system suppliers
The scope is to define the linearity of the MFC (controller with integral flow transducer and control valve) and the mass flow meter (MFM) (flow transducer only)
more reliable execution times
SEMI D75-0524 (technical revision)
E10900 - SEMI E109 - Specification for Reticle and Pod Management (RPMS) StdPbc-0118 6-0421 (technical revision)This Specification provides standardized behavior for lithography, reticle inspection, and bare reticle stocker equipment. It also provides for standardized communication with lithography, reticle inspection, and bare reticle stocker equipment. This includes the coordination, execution, and completion of automated and manual reticle pod transfers to and from the equipment, transfer of reticles to and from the reticle pods, movement of the reticles
US$ 144500.00
US$ 210300.00
