S00900 - SEMI S9 - Guide to Electrical Design Verification Tests for Semiconductor Manufacturing Equipment that have Been Moved to SEMI S22 Revision:SEMI S9-0307 (Withdrawn 0211) - Withdrawn 1 The purpose of this

1  The purpose of this Specification is to provide visual inspection and acceptance criteria for gas tungsten arc (GTA) welds of stainless steel and other corrosion resistant metals and alloys (CRAs) in fluid (liquid or gas) distribution systems in semiconductor manufacturing applications

SEMI E38 — Cluster Tool Module Communications (CTMC)

SEMI M31 — Mechanical Specification for Front-Opening Shipping Box Used to Transport and Ship 300 mm Wafers

本仕様はフラットパネルディスプレイ用ガラス基板の供給者および，あるいは購入者により利用され，使用されるすべてのガラス基板に有効である。

This Guide is intended for use with other practices and test methods

S00900 - SEMI S9 - Guide to Electrical Design Verification Tests for Semiconductor Manufacturing Equipment that have Been Moved to SEMI S22 Revision:SEMI S9-0307 (Withdrawn 0211) - Withdrawn 1 The purpose of thisThe purpose of this document is to provide a permanent withdrawal notice for SEMI S9 indicating that all technical content has been incorporated within SEMI S22. Referenced SEMI Standards SEMI S1 Safety Guideline for Equipment Safety Labels SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment SEMI S22 Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment