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PV04800 - SEMI PV48 - Specification for Orientation Fiducial Marks for PV Silicon Wafers Revision:SEMI PV48-0613 - Superseded This Guide provides a framework

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Description

This Guide provides a framework for communicating specific values limiting feature levels and/or densities as agreed upon between suppliers and users

5  These test methods do not cover requirements either for the equipment used to measure the edge profile or for the methodology of such measurement

1  This Specification covers ordering information and certain requirements for high-purity (electronic grade)

The purpose of this Guide is to identify resource information on compatibility of gases in contact with silicon in the wetted path of a gas delivery system operating at typical gas distribution system conditions

orgで入手可能となる。初版は2006年3月発行。

PV04800 - SEMI PV48 - Specification for Orientation Fiducial Marks for PV Silicon Wafers Revision:SEMI PV48-0613 - Superseded This Guide provides a frameworkDimensional metrics as described in several SEMI Test Methods do not define wafer physical orientation during measurement. Measurements of the same wafer differently oriented (rotated or flipped between measurements) result in permuted data sets, within the limits of the measurement equipment precision. This may generate confusion or at least discussions during claim handling or specification verification. It may also benefit some solar cell process

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