M06400 - SEMI M64 - Test Method for the EL2 Deep Donor Concentration in Semi-Insulating (SI) Gallium Arsenide Single Crystals by Infrared Absorption Spectroscopy StdDcs-Withdrawn Vendor independence and openness are

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careful process and quality control of the wafer waviness during CSW and device manufacturing requires continuous monitoring of waviness by the supplier as well as by the user of CSW

This method focuses on improving the accuracy and repeatability of the measurement by standardizing the test conditions and reporting and by routine calibration of the measurement

This Test Method is useful for sodium

本スタンダードは，global Compound Semiconductor Committeeで技術的に承認されている。現版は2011年5月13日，global Audits and Reviews Subcommitteeにて発行が承認された。2011年6月にwww

M06400 - SEMI M64 - Test Method for the EL2 Deep Donor Concentration in Semi-Insulating (SI) Gallium Arsenide Single Crystals by Infrared Absorption Spectroscopy StdDcs-Withdrawn Vendor independence and openness areThe purpose of this Test Method is to specify a method to measure the concentration of the deep donor EL2 in SI GaAs by infrared absorption. This Test Method covers a procedure for measuring the concentration of the deep donor EL2 in SI GaAs. This method focuses on improving the accuracy and repeatability of the measurement by standardizing the test conditions and reporting and by routine calibration of the measurement. This Test Method is intended to