G09400 - SEMI G94 - 300mmウェーハ用コインスタック型テープフレーム出荷容器の仕様 Revision:SEMI G94-0113 - Superseded SEMI E28-1110 (technical revision)

SEMI E28-1110 (technical revision)

9 — Mechanical Specification for Cassette Used to Transport and Store 300mm Wafers

Optional attributes

This Test Method identifies and measures cracks in crystalline silicon wafers of a module

本ガイドは，シリコンウェーハに関するナノポトグラフィ表面特徴を報告するためのフレームワークを提供する。

G09400 - SEMI G94 - 300mmウェーハ用コインスタック型テープフレーム出荷容器の仕様 Revision:SEMI G94-0113 - Superseded SEMI E28-1110 (technical revision)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Assembly & Packaging Global Technical Committee20121220global Audits and Reviews Subcommittee20131www. semiviews. org www. semi. org 300mm 5. 1. 1 (SEMI G74) (SEMI G87) 13 Referenced SEMI Standards SEMI G59 Test Method for Measurement