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• Reduction of communication and computation overhead and cost due to recipe download related transactions by adopting cache operation
SEMI F79-0914 (technical revision)
1-0308 (technical revision)
References are cited
SEMI C27-0699 (first published - replaces SEMI C1
E12000 - SEMI E120 - COMMON EQUIPMENT MODEL 사양 StdPbc-0823 • Reduction of communication andThis Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 23, 2013. Available at www. semiviews. org and www. semi. org in April 2014; originally published March 2003; previously published March 2010. The purpose of this Specification is to provide a generally applicable object model of semiconductor equipment
