C00332 - SEMI C3.32 - Specification for Chlorine (Cl2), 99.996% Quality Revision:SEMI C3.32-1109 - Superseded SEMI C23-0301 (technical revision)

SEMI C23-0301 (technical revision)

Dichlorosilane is a flammable

1  Frequently it is essential to control the boron level in heavily-doped n-type substrates used to make epitaxial wafers because the boron contamination can result in autodoping at the epitaxial silicon-substrate interface

as assessed using SEMI S10 and SEMI S14 and considering the hazards discussed within this Document

but does not have useful (<1011 atoms/cm2) detection limits for sodium

C00332 - SEMI C3.32 - Specification for Chlorine (Cl2), 99.996% Quality Revision:SEMI C3.32-1109 - Superseded SEMI C23-0301 (technical revision)The purpose of this Document is to provide specification for chlorine (Cl2) that is used in the semiconductor industry. This Document covers requirements for chlorine used in the semiconductor industry. Referenced SEMI Standards None.