E14200 - SEMI E142 - Specification for Substrate Mapping Revision:SEMI E142-0705 - Superseded For housings with removable filter

For housings with removable filter cartridges

previously published November 2015

disposing of components

SEMI E142-0305 (first published)

SEMI E132-0923 (Reapproved 0624)

E14200 - SEMI E142 - Specification for Substrate Mapping Revision:SEMI E142-0705 - Superseded For housings with removable filter1 Purpose 1. 1 This Specification defines the data items that are required to report, store, and transmit map data for substrates such as wafers, frames, strips, and trays. 2 Scope 2. 1 This version of the Specification applies to the substrate types: wafers, frames, strips, and trays. 2. 2 This Specification addresses assembly and packaging including the testing of semiconductor devices. Subordinate Standards (included) SEMI E142. 1 Specification for