M08200 - SEMI M82 - Test Method for the Carbon Acceptor Concentration in Semi-Insulating Gallium Arsenide Single Crystals by Infrared Absorption Spectroscopy Revision:SEMI M82-0712 - Superseded storage or archiving of substrate

storage or archiving of substrate maps

Qualitative Measures of Compliance

SEMI F98-0618 (complete rewrite)

the specification defined for determining the hardness of coating film

This Document accomplishes this by defining an operational model for prober equipment as viewed by a factory automation controller

M08200 - SEMI M82 - Test Method for the Carbon Acceptor Concentration in Semi-Insulating Gallium Arsenide Single Crystals by Infrared Absorption Spectroscopy Revision:SEMI M82-0712 - Superseded storage or archiving of substrateThis Test Method covers the determination of the carbon content in GaAs using infrared (IR) absorption. The test method utilizes the linear relationship between the carbon content and the integrated absorption of the localized vibration of substitutionally bonded carbon (CAs). At a measurement temperature of 300 K (room temperature) this absorption band is observed at 580 cm1, at 77 K between 582 and 583 cm1. This Test Method covers the determination