ME139200 - SEMI ME1392 - Guide for Angle Resolved Optical Scatter Measurements on Specular or Diffuse Surfaces Revision:SEMI ME1392-96 (Reapproved 2002) - Superseded Report equipment’s time in state

Report equipment’s time in state to a host computer

SEMI E37-0819 (technical revision)

The scope of this Document covers high purity zirconium amides

SEMI F104-0520 (technical revision)

Data taken at particular incident and scatter directions are not extrapolated to other directions

ME139200 - SEMI ME1392 - Guide for Angle Resolved Optical Scatter Measurements on Specular or Diffuse Surfaces Revision:SEMI ME1392-96 (Reapproved 2002) - Superseded Report equipment’s time in stateThis Guide explains a procedure for the determination of the amount and angular distribution of optical scatter from an opaque surface. In particular it focuses on measurement of the BRDF, which is a convenient and well accepted means of expressing optical scatter levels for many purposes. Additional data presentation formats described in Related Information 1 have advantages for certain applications. Surface parameters can be calculated from optical