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The purpose of this Standard is to provide specification for ammonia (NH3) that is used in the semiconductor industry
and process equipment applications
exceptions
the actual diameter of nominal 300 mm wafers may millimeters smaller
buffer oxide etchants
E08000 - SEMI E80 - Test Method for Determining Attitude Sensitivity of Mass Flow Controllers (Mounting Position) StdPbc-0813 The purpose of this StandardThe purpose of this Test Method is to provide a standardized method for quantifying the effect of mounting attitude on a mass flow controller (MFC). This Standard provides a common basis for communication between manufacturers and users regarding testing and describing MFC mounting effects. This Standard describes a method to determine the effect of attitude (mounting position) of a MFC on flow span and zero. The intent of this Standard is not to
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