HB00300 - SEMI HB3 - Specification for the Mechanical Interface for 150 mm HB-LED Load Port StdPbc-0913 Appendices include background information on

Appendices include background information on the equipment specified and calibration procedures

SEMI E16-0611 (technical revision)

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2  Final assemblies should be evaluated according to the criteria of SEMI S2 for environmental

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HB00300 - SEMI HB3 - Specification for the Mechanical Interface for 150 mm HB-LED Load Port StdPbc-0913 Appendices include background information onThis Standard was technically approved by the HB LED Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31, 2016. Available at www. semiviews. org and www. semi. org in October 2016; originally published November 2013. The purpose of this Document is to define the basic interface dimensions of a load port and their arrangements on HB LED manufacturing equipment, where HB LED