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SEMI E111-0303E (editorial revision)
The purpose of this Document is to provide specifications for arsine (AsH3) that is used in the semiconductor industry
本スタンダードは，FPD用カラーフィルタの耐薬品性を評価するための試験方法を2つ規定する。一方は，定性的であり，もう一方は定量的なものである。
Alternative methods may be used as long as they comply with SEMI C1 requirements for method validation
NOTICE: This Document was balloted and approved for withdrawal in 2012
C06100 - SEMI C61 - Specification for Bar-Code Container Identification Revision:SEMI C61-0707 - Superseded SEMI E111-0303E (editorial revision)NOTICE: This Document was balloted and approved for withdrawal in 2010. To provide a minimal set of guidelines for precision and data reporting practices for data supporting a Process Chemicals or Gases SEMI Specification. This Guide applies to data collected to support establishment of a SEMI Process Chemicals or Gases Specification or verification of performance to such a SEMI Specification. Referenced SEMI Standards (purchase separately) SEMI C1
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