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SEMI E88-0303 (technical revision)
tetrakis(dimethylamino) zirconium
NOTICE: Paragraphs entitled NOTE are not an official part of this Document and are not intended to modify or supersede it
orgで入手可能となる。初版は1996年発行。前版は2004年11月発行。
This Standard describes a framework for identifying and classifying technical training tiers
C03800 - SEMI C38 - Guide for Phosphorus Oxychloride StdDcs-Withdrawn - Historical SEMI E88-0303 (technical revision)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The purpose of this Standard is to provide a guide for a grade of phosphorus oxychloride for which a need has been identified. 2 Scope 2. 1 This Standard lists the proposed impurity limits of phosphorus
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