E04600 - SEMI E46 - Test Method for the Determination of Organic Contamination from Minienvironments Using Ion Mobility Spectrometry (IMS) Revision:SEMI E46-0307 - Inactive CP uses a stylus or

CP uses a stylus or probe tip that interacts with the surface of interest and moves at a known speed across the surface while recording the up and down movement of the tip relative to the surface

PVD and Plating)

SEMI F98-0521 (technical revision)

SEMI D6-1296 (technical revision)

This procedure involves measurement of total Cr/Fe ratios

E04600 - SEMI E46 - Test Method for the Determination of Organic Contamination from Minienvironments Using Ion Mobility Spectrometry (IMS) Revision:SEMI E46-0307 - Inactive CP uses a stylus orNOTICE: This Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The purpose of this Test Method is to provide an analytical procedureion mobility spectrometry (IMS)for the determination of organic contamination from minienvironments which has the capability of testing their