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C00343 - SEMI C3.43 - Standard for Hydrogen Fluoride (HF), Anhydrous (Provisional) StdTpc-Equipment Process Control The trimming width

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4.3

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Description

The trimming width

製造装置上のトランスファポイント(受け渡しポジション)のオブジェクト状態モデル

colorless gas

SEMI 3D2-1113 (technical revision)

This Guide describes silicon wafers with nominal diameter of 300 mm although

C00343 - SEMI C3.43 - Standard for Hydrogen Fluoride (HF), Anhydrous (Provisional) StdTpc-Equipment Process Control The trimming widthThis Standard was technically approved by the Gases Global Technical Committee. Available at www. semi. org in July 2001; originally published in 1990. NOTICE: This Document was balloted and approved for withdrawal in 2001. Hydrogen fluoride is a highly toxic, irritating and corrosive gas with a sharp, pungent odor. It is colorless and nonflammable, but reacts violently with most organic materials. Referenced SEMI Standards None.

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