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SEMI D59-0710 (first published)
In addition to the information embodied in this Standard
1-0302 (technical revision)
1 The purpose of this Standard is to provide clear and commonly accepted definitions of through glass via (TGV) and to provide a consistent terminology for the understanding and discussion of metrology issues important them
The intent of these specifications and the associated procedures is
E11600 - SEMI E116 - Specification for Equipment Performance Tracking StdTpc-Process Chemicals - Acids SEMI D59-0710 (first published)This Standard provides specification for implementing basic equipment performance tracking (EPT) for production equipment. Provisions in this Standard enable the host computer to track basic equipment performance in an automated and consistent matter, without operator or host input. This Standard provides specification for equipment suppliers to: Track basic equipment states (no operator or host input required). Track basic equipment states in a
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