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The appropriate application of this Safety Guideline will result in a report which identifies
developers
This Test Method covers the determination of total oxygen concentration in the bulk of single crystal silicon substrates using SIMS
SEMI MS5-0813 (technical revision)
Recognize common hazard controls in semiconductor fabrication facilities
P04900 - SEMI P49 - Specification for Experimental Curvilinear Multigon Extension to SEMI P39 StdPbc-0213 The appropriate application of thisNOTICE: This is a Preliminary Standard. Preliminary Standards are approved for publication by a single chapter of a technical global committee for information and comment prior to letter balloting for its adoption as a Full consensus Standard. Preliminary Standards are published for a period of no more than two years, unless a publication extension is granted by the International Standards Committee. This Preliminary Standard will be removed from
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