G06500 - SEMI G65 - Lリード（ガルウイング型）パッケージ用リードフレーム材料の評価の試験方法 StdPbc-0914 Oxide precipitates in the bulk

Oxide precipitates in the bulk of a silicon wafer can act as gettering sites for contamination that may be introduced during manufacture of circuits and devices

SEMI G89-0211 (Reapproved 0823)

and the input and exit ports of production equipment or minienvironments

root mean square deviation of the assessed profiles in nanometers

SEMI E126-0308 (technical revision)

G06500 - SEMI G65 - Lリード（ガルウイング型）パッケージ用リードフレーム材料の評価の試験方法 StdPbc-0914 Oxide precipitates in the bulkglobal Assembly & Packaging Technical Committee201171global Audits and Reviews Subcommittee20118www. semiviews. org www. semi. org1996200411 : L Referenced SEMI Standards None.