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and hydrogen service
6-1103 (technical revision)
SEMI 3D11-1214 (Reapproved 0420)
SEMI C47-0706 (complete rewrite)
the test sample is touchscreen panel incorporated with display
F02900 - SEMI F29 - Test Method for Purge Efficacy of Gas Source System Panels StdPbc-1122 and hydrogen serviceNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard defines the purge efficacy test method recommended for determining the minimum acceptable level of purge efficacy for gas source systems used in semiconductor manufacturing. It is also intended as an aid to
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