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機械特性
polyvinylidene fluoride (PVDF)
Static leach tests should be used for quality assurance when baseline virgin resin quality has already been established (otherwise use the dynamic leach test to estimate the rinse-up time)
SEMI E133-0318 (technical revision)
The specification in this Standard covers representative handoff interfaces between 450 mm AMHS stocker and transport equipment for 450 Wafer Carrier
E12200 - SEMI E122 - Specification for Tester Equipment Specific Equipment Model (TSEM) StdTpc-Mass Flow Controllers 機械特性This Standard establishes a Specific Equipment Model for testing equipment (TSEM). The TSEM consists of equipment characteristics and behaviors that apply to this class of equipment. These characteristics and behaviors are required to be implemented. The intent of this Standard is to facilitate the integration of testing equipment into an automated semiconductor factory. This Standard accomplishes this by defining an operational model for testing
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