S01600 - SEMI S16 - Guide for Semiconductor Manufacturing Equipment Design for Reduction of Environmental Impact at End of Life Revision:SEMI S16-0307 - Superseded Printers with higher resolution may

Printers with higher resolution may be used

Utilities and Materials Used by Semiconductor Manufacturing EquipmentSEMI S26 — Environmental

現在のSEMIスタンダードに拡張可能マークアップ言語（XML）表記法を含めることは，XML技術に対する関心が業界で高まっていることを反映している。本スタンダードでは，SEMI E5，SEMI E6，および国際単位系（SI）で定義された単位に基づき，半導体産業のためにXMLによる測定単位の記号表記を定義する。その目的は，半導体産業に共通単位を表す一連の標準記号を規定し，共通規則を用いた標準手法に基づいて他の記号を追加するための仕組みを示すことである。

これらの寸法は，主として

Substrates with an edge length less than 200 mm follow the specifications for a semiconductor mask (refer to SEMI P1)

S01600 - SEMI S16 - Guide for Semiconductor Manufacturing Equipment Design for Reduction of Environmental Impact at End of Life Revision:SEMI S16-0307 - Superseded Printers with higher resolution mayThis Standard was technically approved by the Environmental, Health, & Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 18, 2012. Available at www. semiviews. org and www. semi. org in August 2012; originally published June 2000; previously published March 2007. NOTICE: This Document was reapproved with minor editorial changes. NOTICE: This Standard or Safety Guideline