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SEMI E21-94 (technical revision)
SEMI E10-0422 (technical revision)
このスタンダードは，プラスチックパッケージリードフレームのZ軸寸法の測定に使用される装置とリードフレームについて記述する。
This Guide logically follows the series of SEMI Standards developed for UPW
This Standard expands the handler equipment requirements and capabilities in the areas of the processing state model
F07000 - SEMI F70 - Test Method for Determination of Particle Contribution of Gas Delivery System Revision:SEMI F70-0611 - Superseded SEMI E21-94 (technical revision)NOTICE: The designation of SEMI F70 was updated during the 0320 publishing cycle to reflect the creation of SEMI F70. 1. The purpose of this Document is to provide a standardized methodology and procedure for measuring the particle contribution performance of a gas delivery system in terms of number of particles added to gas flowing through the system. This standardized procedure is intended to be used commonly by the gas delivery system suppliers,
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