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Alternative methods may be used as long as they have been validated in accordance with the requirements of SEMI C1
SEMI MF928 — Test Method for Edge Contour of Circular Semiconductor Wafers and Rigid Disk Substrates
SEMI E6-1296 (technical revision)
• Metrology equipment
The purpose of this Document is to provide a specification for boron trifluoride (BF3) used in the semiconductor industry
D07500 - SEMI D75 - Test Method for Color Reproduction and Perceptual Contrast of Display Revision:SEMI D75-0524 - Current Alternative methods may be usedThis Standard specifies measurement conditions and methods for describing the visual color quality in three dimensional (3D) color space, and the perceived contrast with perceptual parameters in color electronic display devices. The CIE XYZ color space is derived from the experimental results and it has been used to set color performance of displays in CIE xy or uv chromaticity diagram without brightness. For measurement, setting test patterns, images
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