F01000 - SEMI F10 - Test Method to Determine the Internal Pressure Required to Produce a Failure of a Tube Fitting Connection Made of Fluorocarbon Materials StdPbc-1021 Determining the root cause of

Determining the root cause of TDDB results is beyond the scope of this Test Method

このスタンダードは，概念と動作からメッセージサービスに至るまでの解決法を提供する。しかしメッセージプロトコルは定義しない。

Originally published March 2008

and the capabilities of error detection on the interface

SEMI S2 — Environmental

F01000 - SEMI F10 - Test Method to Determine the Internal Pressure Required to Produce a Failure of a Tube Fitting Connection Made of Fluorocarbon Materials StdPbc-1021 Determining the root cause ofNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This method provides a uniform procedure to determine the internal pressure required to produce failure of fitting connections made of fluorocarbon materials. This method can be used to characterize tube fitting connections