D00600 - SEMI D6 - Specification for Flat Panel Display (FPD) Mask Substrates Revision:SEMI D6-0305 - Superseded · Transfer of general-purpose data

· Transfer of general-purpose data between equipment

a subsystem

SEMI E16-90 (Reapproved 0699)

SEMI C33-0699 (first published - replaces SEMI C1

and for the handling and shipping of wafers

D00600 - SEMI D6 - Specification for Flat Panel Display (FPD) Mask Substrates Revision:SEMI D6-0305 - Superseded · Transfer of general-purpose dataThis Specification defines the standard for substrates used to fabricate flat panel display masks. This Specification applies to photomasks that are principally used in fabricating flat panel displays. The edge lengths specified range from 202. 8 mm 202. 8 mm to 1620 mm 1780 mm. Substrates with an edge length less than 200 mm follow the specifications for a semiconductor mask (refer to SEMI P1). Referenced SEMI Standards (purchase separately) SEMI P1