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An eddy-current gauge directly measures conductance of a specimen
This Standard identifies key equipment quality information parameters
contamination
SEMI MF723-0307 (technical revision)
shallow pits
F01000 - SEMI F10 - フッ素樹脂製チューブフィッティングに損傷を生じさせるのに必要な内部圧力を決定するためのテスト方法 StdTpc-Equipment - Facilities Interface An eddy-current gauge directly measuresNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. SI
