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SEMI G92 — Specification for Tape Frame Cassette for 450 mm Wafer
SEMI C23-0714 (Reapproved 0620)E
Equipment Communication Standards1 Messages Transfer (SECS-I) or the protocol defined in SEMI E37
transfer of reticles to and from the reticle pods
• Equipment recipe execution as it directly affects process modules
E15400 - SEMI E154 - Specification for Mechanical Features of 450 mm Load Port Revision:SEMI E154-0713 - Superseded SEMI G92 — Specification forThe purpose of this Document is to define the basic interface dimensions of a load port on the semiconductor manufacturing equipment (SME), where a 450 FOUP and 450 MAC can be loaded and unloaded. The intention of this Document is to define a set of requirements and features to enable interoperability of load ports and carriers without limiting innovative solutions. The interface specification in this Document is driven by and intended to mate with a
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