F08700 - SEMI F87 - Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems Revision:SEMI F87-0304 - Superseded together with test methods suitable

together with test methods suitable for determining their magnitudes

such as identification for both sides of films

This Specification describes the volume within any process or cassette module which shall be accessible to the transport module end effector in a cluster tool

and micro-bump are developed to ensure high-yield of the middle-end process

SEMI PV66-0715 (Reapproved 0221)

F08700 - SEMI F87 - Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems Revision:SEMI F87-0304 - Superseded together with test methods suitableNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 This Standard establishes the properties and physical dimensions of two port components for 1. 125 inch type surface mount gas distribution system. 2 Scope 2. 1 This Standard includes common requirements,