F01200 - SEMI F12 - Test Method to Determine the Sealing Capabilities of Fittings, Made of Fluorocarbon Material, after Being Subjected to a Heat Cycle Revision:SEMI F12-0998 - Inactive dry as-cut Si wafers that

dry as-cut Si wafers that are supported by two belts that move the test specimen through the measurement equipment

SEMI F1 — Specification for Leak Integrity of High-Purity Gas Piping Systems and Components

SEMI MF847 — Test Method for Measuring Crystallographic Orientation of Flats on Single Crystal Silicon and Wafers by X-Ray Techniques

このガイドは，SEMIプロセスケミカルまたはガススタンダードおよびガイドに指定された微量不純物に適用される。該当するすべての微量不純物について，校正曲線の回帰分析に基づいて，それぞれの仕様と同等またはそれ以内のMDLを決定すべきである。このガイドはSEMI仕様に対する性能の検証およびSEMIにおける新規仕様の制定の両面への適用を意図している。

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F01200 - SEMI F12 - Test Method to Determine the Sealing Capabilities of Fittings, Made of Fluorocarbon Material, after Being Subjected to a Heat Cycle Revision:SEMI F12-0998 - Inactive dry as-cut Si wafers thatNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This method provides a uniform procedure to determine the sealing capabilities of fluorocarbon resin fittings, after they have been subjected to an elevated ambient temperature and cooled to room temperature (hereafter