M08700 - SEMI M87 - Test Method for Contactless Resistivity Measurement of Semi-Insulating Semiconductors StdTpc-Equipment Models This Test Method is referred

This Test Method is referred to as a preferred method of RF power measurement for conforming to SEMI E113

3-0698 (first published)

本仕様は，

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their specifications

M08700 - SEMI M87 - Test Method for Contactless Resistivity Measurement of Semi-Insulating Semiconductors StdTpc-Equipment Models This Test Method is referredThe purpose of this Test Method is to specify methods for the contactless measurement of the resistivity of semi insulating samples and wafers. This Test Method covers the determination of the electrical resistivity of semi insulating semiconductors, including GaAs, InP, CdTe, Cd(Zn)Te, SiC, GaN, and AlN, within the resistivity range 1E5 to 1E12 cm. It may also be used to characterize other materials exhibiting resistivity in this range, including in