E15300 - SEMI E153 - AMHS SEMの仕様（AMHS SEM） Revision:SEMI E153-1109 - Superseded For these wafers

For these wafers

SEMI MF950-1107 (Reapproved 0912)

技能メンテナンスのトリガー（技能認定書の期限切れなど）をモニターし，技能メンテナンスジョブの実施を勧告する。

This document supplements the existing provisions in SEMI S2 (for Hazardous Energy Isolation) and SEMI S13 (for providing appropriate documentation) with a uniform graphical representation and identification system

it distinguishes between mechanical and diffusion leak rates

E15300 - SEMI E153 - AMHS SEMの仕様（AMHS SEM） Revision:SEMI E153-1109 - Superseded For these wafersglobal Information & Control Committee2010120global Audits and Reviews Subcommittee20102www. semi. org200911 AMHSSEMAMHS SEMSEMI E30AMHS SEMAMHS SEMSEMI E84 11GEMSEMI2SECS IISECSTRANSFERTSSC 11GEMAMHS SEMTSSCTRANSFERGEM Referenced SEMI Standards SEMI E5 SEMI Equipment Communications Standard 2 Message Content (SECS II) SEMI E30 Generic Model for Communications and Control of Manufacturing Equipment (GEM) SEMI E37 High Speed SECS Message Services