F06400 - SEMI F64 - Test Method for Determining Pressure Effects on Indicated and Actual Flow for Mass Flow Controllers StdTpc-Wafer Edge Profile SEMI F20-0997 (technical revision)

SEMI F20-0997 (technical revision)

to be exchanged on an interface for horizontal communication between adjacent PV equipment

4-1022 (first published)

thus allowing immediate hook-up of the equipment upon arrival in the wafer fab

3-0915 (first published)

F06400 - SEMI F64 - Test Method for Determining Pressure Effects on Indicated and Actual Flow for Mass Flow Controllers StdTpc-Wafer Edge Profile SEMI F20-0997 (technical revision)This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 18, 2017. Available at www. semiviews. org and www. semi. org in March 2018; originally published July 2001; previously published November 2011. The purpose of this Document is to define a method for characterizing a mass flow controller (MFC) being considered for installation