E05419 - SEMI E54.19 - Specification for Sensor/Actuator Network for MECHATROLINK StdTpc-Ultrapure Water The SEDD is intended to

The SEDD is intended to be a data set that documents key elements of a SECS-II interface

本スタンダードは，Physical Interfaces & Carriers Global Technical Committeeで技術的に承認されている。現版は2014年6月17日，global Audits and Reviews Subcommitteeにて発行が承認された。2014年8月にwww

equipment subsystem suppliers and control system suppliers who will utilize the PCS standards in future developed products

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SEMI E125-0704 (technical revision)

E05419 - SEMI E54.19 - Specification for Sensor/Actuator Network for MECHATROLINK StdTpc-Ultrapure Water The SEDD is intended toNOTICE: This Document is no longer published with the SEMI E54 suite of Standards. It is published and sold separately. This Document defines a communication specification based on the MECHATROLINK protocol to enable communications between intelligent devices on a sensor actuator network (SAN) that operate according to SEMI E54 device models on semiconductor manufacturing equipment. This Document gives interoperability with SEMI E54 common specific