F00500 - SEMI F5 - ガス状廃棄物処理のガイドライン StdPbc-0120 such as pellets of perfluoroalkoxy

such as pellets of perfluoroalkoxy (PFA)

2 through SEMI E49

SEMI E172 — Specification for SECS Equipment Data Dictionary (SEDD)

注意： SEMI E139は，SEMI E139

A complete purchase specification may require the defining of additional physical

F00500 - SEMI F5 - ガス状廃棄物処理のガイドライン StdPbc-0120 such as pellets of perfluoroalkoxyNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Environmental Health and Safety CommitteeNorth American Environmental Health & Safety Committee2001827North American Regional Standards Committee20019www. semi. org2001111990 NOTICE: This Standard or Safety Guideline has an