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In the case of a guide
Capacity tests are done by adding ppm levels of a given gaseous impurity to a pure zero gas and monitoring the effluent of the test purifier for active impurity species
This edition was approved for publication by the global Audits and Reviews Subcommittee on July 6
front-opening box for interfactory transport (FOBIT) or open cassette inside an IC manufacturing facility
향후 반도체 공장은 더 무거워진FOUP및 오픈 카세트(open cassettes)를 포함하는 웨이퍼 캐리어(carrier)를 전송하기 위해서 대규모의 자동화된 재료 처리 시스템(AMHS)을 사용할 것이다
F03700 - SEMI F37 - ガス供給システム構成部品の表面粗さパラメータの算出方法 StdPbc-1115 In the case of aglobal Gases Committee2011513global Audits and Reviews Subcommittee20116www. semiviews. org www. semi. org19992200411 : Referenced SEMI Standards None.
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