P03700 - SEMI P37 - Specification for Extreme Ultraviolet Lithography Substrates and Blanks Revision:SEMI P37-0613 - Inactive orgで入手可能となる。初版は1999年6月発行。前版は，2004年11月発行。

orgで入手可能となる。初版は1999年6月発行。前版は，2004年11月発行。

To comply with this Specification

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met

Some terms are specialized to integrated circuit wafer and device production

SFQD and SBIR

P03700 - SEMI P37 - Specification for Extreme Ultraviolet Lithography Substrates and Blanks Revision:SEMI P37-0613 - Inactive orgで入手可能となる。初版は1999年6月発行。前版は，2004年11月発行。This Standard was technically approved by the Micropatterning Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 1, 2013. Available at www. semiviews. org and www. semi. org in June 2013; originally published November 2001; previously published November 2009. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not