C00607 - SEMI C6.7 - 高圧ガスシリンダ中のグレード10/0.2窒素に対するパーティクル仕様 Revision:SEMI C6.7-93 (Reapproved 1111) - Replaced depending on your company's needs

depending on your company's needs

this Guide can be applied to all materials that show low stiffness in certain deformation modes

It includes generic overlay target design methodology

The assumption of wafer-to-wafer (W2W)

gravity compensation errors increase until they become larger than the actual wafer surface variations

C00607 - SEMI C6.7 - 高圧ガスシリンダ中のグレード10/0.2窒素に対するパーティクル仕様 Revision:SEMI C6.7-93 (Reapproved 1111) - Replaced depending on your company's needsNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Gases Global Technical Committee2011912global Audits and Reviews Subcommittee201111www. semiviews. org www. semi. org1993200211 NOTICE: This Document is no longer supported by the global technical committee. It has been replaced by