PV06400 - SEMI PV64 - 电感耦合等离子体光谱法测量光伏多晶硅用工业硅粉中B, P, Fe, Al, Ca的含量 Revision:SEMI PV64-0715 - Superseded NOTICE: This translation is a

NOTICE: This translation is a REFERENCE COPY ONLY

routine quality control and incoming/outgoing inspection purposes

This Guide is complementary to SEMI E78 and SEMI E129 and is intended to improve the protection of the most electrostatic damage-susceptible items

status variables or equipment constants)

that can affect the target bulk resistivity of the solar cell wafer

PV06400 - SEMI PV64 - 电感耦合等离子体光谱法测量光伏多晶硅用工业硅粉中B, P, Fe, Al, Ca的含量 Revision:SEMI PV64-0715 - Superseded NOTICE: This translation is aNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. This Standard was technically approved by the Photovoltaic Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 19, 2015. Available at www. semiviews. org and www. semi. org