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and fire risk reduction
• Parts such as a nut or gripper are not limited to being made of a fluorocarbon material
SEMI T22-0212 (Reapproved 0324)
and shipping
1 This Standard is applicable to measurement for optical properties of electronic paper displays under diffuse or directional illumination
MS00300 - SEMI MS3 - Terminology for MEMS Technology StdPbc-0418 and fire risk reductionThis Standard was technically approved by the MEMS NEMS Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 19, 2015. Available at www. semiviews. org and www. semi. org in September 2015; originally published as SEMI PR11 1105; previously published March 2007. Microelectromechanical Systems (MEMS) technology, while related in many ways to integrated circuit and device technology,
