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4 µm (16 µin
SEMI C23-0714 (Reapproved 0620)E
1-1104 (first published)
and phosphorus
FPDに適用される。本スタンダードは，主にSemuの測定方法およびSemuの改訂された定義を取り扱う。対象とする画面サイズは，通常，対角線長で20
HB00400 - SEMI HB4 - Specification of Communication Interfaces for High Brightness LED Manufacturing Equipment (HB-LED ECI) Revision:SEMI HB4-0913 (Reapproved 0419) - Superseded 4 µm (16 µinThe purpose of this Standard is to define the equipment automation interface for communication and control of process, automation and metrology equipment used in high brightness light emitting diode (HB LED) manufacturing. It intends to produce economic benefits for both manufacturers and equipment suppliers by identifying a subset of relevant functionalities out of the existing SEMI Communications Standards for the application in HB LED manufacturing
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